- Appearance:White to off-white crystalline powder
- MP/BP:MP:130-140 ºC
- Assay/specification:≥95%(HPLC)
- Purpose:用于微电子、半导体领域高纯度的钝化层和介质层;MEMS领域用作钝化、防护、润滑等涂层;在生物医学防腐及文物保护等领域作为隔离、固化、加固材料。
- Storage:normal temperature
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