Parylene HT

1. Basic information of Parylene HT

Product name: Fluorinated dimer para-xylene;

Alias: 1,1,2,2,9,9,10,10-Octafluoro[2.2]paracyclophane,Parylene AF4

Purity: ≥98%

CAS number: 3345-29-7

Molecular formula: C₁₆H₈F₈

Molecular weight: 352.2219

Appearance: white crystal

Melting point: 240-250 ºC

Storage conditions: sealed

Usage description: Parylene HT is used for high-purity passivation and dielectric layers in the fields of microelectronics and semiconductor; in the field of MEMS as passivation, protection, lubrication and other coatings; in the fields of biomedical anti-corrosion and cultural relic protection as isolation, curing and reinforcement materials.

2.Introduction of Parylene HT

Compared with parylene N, Parylene HT only replaces the hydrogen atoms on the methylene group with F atoms, which significantly improves the anti-oxidation, anti-ultraviolet, and anti-radiation capabilities of the parylene film. Parylene HT film has many excellent functions such as moisture resistance, mildew resistance and salt spray resistance, and is widely used in military radars, electronic devices and cultural relics protection.

3.Coating example

Under the condition of using a vacuum pump to ensure the degree of vacuum, AF₄ is gasified in a high-temperature sublimation furnace, and after entering the cracking furnace, it is cracked into monomer free radicals at high temperature, and then enters the deposition chamber for free radical polymerization to form parylene HT film. Coating process parameters: The pressure in the sublimation furnace is controlled at approximately 13.30 Pa, which is close to vacuum, the cracking temperature is controlled at 650°C, the pressure of the deposition chamber is controlled at about 2.66-5.32 Pa, the substrate temperature is 0°C, and the deposition rate is about 1.5× 10^-8 cm/min.

4.Parylene HT film properties

Table 1. Thermal properties of parylene HT

Table 2. The mechanical properties and barrier properties of parylene HT

Table 3. Electrical properties of parylene HT

References:

Research on the preparation process of parylene HT film raw materials[D], Southeast University, 2016